Smart gas detector using a Catalyser with Electrochemical sensor for Hexafluorobutadiene (C4F6), Octafluorocyclopentene (C5F8), Carbonyl Sulfide (COS) gas detection in Semiconductor processing applications.
| Model | TP-70DGII |
|---|---|
| Detection principle | Catalyser + Electrochemical type |
| Detectable gas* | C4F6 / C5F8 / COS |
| Gas concentration | display Character LCD (Digital and Bar-Meter Display) |
| Measuring range* | C4F6：0~5ppm / C5F8：0~5ppm / COS：0~15ppm |
| Detection method | Pump suction type・pyrolysis type |
| Flow rate | 0.5L / min±10% |
| Alarm set point* (standard setting) | C4F6：2ppm (1st), 4ppm (2nd) / C5F8：2ppm (1st), 4ppm (2nd) / COS：5ppm (1st), 10ppm (2nd) |
| Power indication | POWER lamp on (green) |
| Various indications | Gas name display / flow rate indicator / mode display / Communication status display / pyrolyzer connection display |
| Output | Gas concentration signal / Gas alarm contact / Trouble alarm contact |
| Alarm accuracy (under an identical condition) | Within ±30% (to the alarm set point value) |
| Alarm delay time (under an identical condition) | Within 60 seconds (by providing the gas 1.6 times the alarm set point (excluding delay in the tube and in the communication)) |
| Gas alarm type | type Two-level alarm (H-HH) |
| Gas alarm indication | indication 1st：ALM1 lamp blinks or lights up (red) 2nd：ALM2 lamp blinks or |
| Gas alarm action* | action* Fault alarm pattern or non latching (Auto-recover) |
| Gas alarm contact* | contact* Each no-voltage contact each 1a or 1b (2 step independent) De-energized (energized at an alarm) or energized (de-energized at an alarm) |
| Fault alarm･ Self diagnosis | System abnormalities / sensor abnormalities / flow rate abnormalities / pyrolyzer heater abnormalities |
| Fault alarm indication | FAULT lamp on (yellow) / detail display |
| Fault alarm action | Auto-recover |
| Fault alarm contact* | No-voltage contact 1a or 1b De-energized (energized at an alarm) or energized (de-energized at an alarm) |
| Contact capacity | AC125V・0.25A / DC24V・0.5A (load resistance) |
| Contact cable | Cable of CVV, etc. (1.25sq) max. 6-core |
| Various functions | White backlight / alarm delay / suppression / zero follower / sensitivity correction / flow control / calibration / history / alarm trend history / event history |
| Power supply for transmission | DC24V±10% (Dedicated line by blocking filter) |
| Power supply for pyrolyzer | AC100~240V±10% |
| Power consumption | 150VA or less |
| Piping port | Rc1 / 4 (O.Dφ6-1t half-union for Teflon tube |
| Initial clear | Approx. 25sec |
| Operating temperature | 20~40℃ (at a constant condition) |
| Operating humidity | 40~70%RH (non-condensing) |
| Structure Tabletop | type |
| Outer dimension | Approx. 180 (W)×225 (H)×285 (D)mm (projection portions excluded) |
| Weight Approx. | 6.0kg |
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